MEMS Sensor for Particulate Matter Measurement of Exhaust Gas 2013-01-0011

To meet Euro6 regulation particulate matter MEMS sensor is suggested. This sensor detects induced charges by PM. To increase sensitivity of the sensor, surface area of the sensor is increased by MEMS process. Sensor is made by low resistive silicon. Total size is 4.3 mm x 59.4 mm x 1 mm and size of sensor part is 4.3 mm x 13 mm. On the backside of the sensor, Pt heater is fabricated to remove piled PM on sensor part. After sensor part, charge amplifier is used to measure the induced charge of the sensor. From FFT of sensor signal, it can sense 5.46 mg/m₃ of PM. In this paper, MEMS devices for exhaust system monitoring of automobiles are investigated. PM emitted from diesel engine is charged particle. Charge-induced-type PM sensor we designed can measure by real time and it doesn't need particle collection apparatus